Picometer Interferometry - the Heart of Digitalization

Jochen Hetzler

Carl Zeiss SMT GmbH

Optics Design Projection (ETSD)
Semiconductor Manufacturing Technology

Zeiss SMT optics are used worldwide for chip manufacturing. The precision of lenses and mirrors based on surface interferometry with picometer accuracy. The talk provides insight into the challenges.

Author: Dr. Jochen Hetzler, 52 years old, 22 years at Zeiss, Expert in Optical Design and Surface Metrology